Automatic micro pump for liquid sample collection for semiconductor manufacturing.
Contributes to maintaining purity in semiconductor manufacturing lines with a high-precision syringe pump.
In the semiconductor manufacturing industry, managing the purity of liquids, which significantly affects product quality, is extremely important. The presence of trace impurities can lead to a decline in product performance and a deterioration in yield. Our micropump eliminates the need for calibration and enables high-precision liquid sample extraction, supporting the maintenance of liquid purity in the manufacturing process. 【Usage Scenarios】 - Sample extraction in quality inspection processes - Chemical supply in semiconductor manufacturing lines - Supply of wafer cleaning solutions 【Benefits of Implementation】 - Maintains liquid purity, contributing to improved product quality - Enhances yield - Achieves a stable manufacturing process
- Company：テカンジャパン
- Price：Other
